This listing is for a Wonderful Cosmetic Condition: BROOKS AUTOMATION VAT WAFER ROBOT ALIGNER for RIE PLASMA ETCHING TRION ORACLE to be used for RIE PLASMA ETCHING TRION ORACLE as can be seen in the pictures.
You will receive
Single 4" (100 mm) Wafer load-lock 4" (100 mm) Cassette load lock
Oracle Plasma Etch Deposition
. SOLA HD GLD-03-200 USPP GLD03200 POWER SUPPLY
. MKS 325 MODUCELL
. MKS VALVES
. ALL ELSE YOU SEE IN THE PICTURES
Wafer Handling Systems
Brooks Automation offers a comprehensive portfolio of configurable atmospheric and vacuum wafer handling platforms and systems. In addition, Brooks provides the ability to create flexible, cost effective, and unique solutions to meet each customer’s specific application. Our dedicated team of experienced professionals uses a proven collaboration methodology: listening to customers’ needs and challenges, reviewing our library of modules, and if necessary, develop customized capabilities, to provide a best-fit wafer handling solution for OEM tool automation.
THIS UNIT IS PRICED LOW SO AS TO SELL, WON'T LAST LONG, IF YOU NEED IT BUY IT!!! WON'T HAVE ANOTHER OPPORTUNITY, THESE ARE RARE!!!!
This unit was pulled out from a working environment due to new Grant Update (University Research).
The TRION was taken offline after the LNF acquired three new SPTS RIE systems.
It is configured with a single 100mm wafer load-lock and 100mm cassette load-lock.
It is used to strike plasma under various conditions, test all types of gases.
This unit came from a working environment where it exercised load-locks and robot.
Stock # 18225
