This listing is for a Wonderful Cosmetic & Operational Condition & Rare: BROOKS AUTOMATION 001-8200-85 CASSETTE ELEVATOR which can be used on TRION ORACLE RIE PLASMA ETCHING WAFER as can be seen in the pictures.
WE ALSO HAVE THE WAFER LOAD-LOCK, IF BUYER IS INTERESTED IN THIS PIECE ALSO, PLEASE LET US KNOW.
This unit was pulled out from a working environment due to new Grant Update (University Research).
THIS BROOKS AUTOMATION 001-8200-85 IS 100% TESTED AND FUNCTIONAL!!!
YOU WILL RECEIVE THE BROOKS AUTOMATION 001-8200-85 CASSETTE ELEVATOR UNIT ON THE PICTURES
IF YOU DON'T SEE IT THEN PLEASE DO NOT ASSUME BECAUSE IT IS NOT INCLUDED!
Model number 001-82-00-68
Substrate/Wafer sizes: up to 100 mm
Range of motion: 2 mm to 100 mm
Repeatability: +- 0.064 mm
Single step peroid: 1.3Sec/6.35mm travel
Slew rate: 35mm/Sec
Laser light: 1mW at 670nm
Load capacity: 20 Lbs.
Switch selectable
Discrete I/O
USED FOR RIE SYSTEM 4" CASSETTE LOAD LOCK
. These BROOKS AUTOMATION VCE 001-8200-85 - Retail for over $ 16.000,00 K New so this is a unique opportunity to get a a fully operational unit for a portion of the price.
