This listing is for a Perfect Operational Condition DELATECH® 857V-2 CHEMICAL VAPOR DEPOSITION CVD EXHAUST GAS SCRUBBER as can be seen in the pictures.
Came from a Federal University which has always taken excellent care of it, that's why it's in such great condition.
This instrument is in working order and was removed from working environment. Unit has minor cosmetic wear from normal use.
The Delatech CDO 857 Exhaust Gas Scrubber has long been considered the standard for Advanced Chemical Vapor Deposition (CVD) Process gas abatement, and has been effectively used with all PECVD, LPCVD & MOCVD process gases.
Delatech scrubbers are also widely used in Thin Film processes.
This versatile gas scrubber utilizes a combination Thermal Oxidation Chamber and a Primary/Secondary Cooling Wet Scrubbing Chamber to effectively abate toxic, flammable and corrosive gases.
Thermal chamber & wet scrub assembly is decontaminated.
Spray nozzles checked for proper flow rate.
CDO functions / sensor/alarms.
Gas Scrubber is tested at full temperature for 24 hours to ensure optimal working order.
Standard Features
Thermal Reaction Chamber features a resistive heating element.
Primary and Secondary wet cooling/scrubbing sections.
Demister Washing System provides automatic cleaning
Exhaust Moisture Suppression System.
Liquid level detection.
Tool interlocks to process tools
Available Options
Cooling/Scrubbing Recirculation
Cabinet Exhaust Alarm
CSI Designed “U” Drain and Cooling Nozzle Assembly
Delatech CDO Selection Criteria
Mixture of Gases
Individual & Total Gas Flow Rates
Duty Cycle
Single Pass or Water Recirculation
Warranty 90 DAYS
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